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ULTRATECH Saturn Spectrum 300 #9357231

ULTRATECH

Saturn Spectrum 300

Stepper, 12" Lens: 2.0µm Robotic wafer handler, 8"-12" Environmental chamber Reticle library Light p
195
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ULTRATECH Saturn Spectrum 300 #9312357

ULTRATECH

Saturn Spectrum 300

Stepper, 8"-12" Illuminator: 1200 Watts (4) EFEM Wep Resolution: 2 um GHI Filer changer MVS PatMax
153
ULTRATECH Saturn Spectrum 300 #9163594

ULTRATECH

Saturn Spectrum 300

Stepper Stored in cleanroom 2002 vintage.
219