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LAM RESEARCH 4520i #9130287

LAM RESEARCH

4520i

Oxide etcher, 6" (2) Press chambers Chamber  cooling: TCU  Lower electrode: ESC with backside helium
101
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LAM RESEARCH 4520i #9399005

LAM RESEARCH

4520i

Etcher, 8".
74
LAM RESEARCH 4520i #9292701

LAM RESEARCH

4520i

Oxide etcher, 6".
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LAM RESEARCH 4520i #9233410

LAM RESEARCH

4520i

Etcher.
87
LAM RESEARCH 4520i #9226619

LAM RESEARCH

4520i

Oxide etchers, 6" Pumps and chiller included ESC.
99
LAM RESEARCH 4520i #9196534

LAM RESEARCH

4520i

Etcher, 6" Verity enhanced endpoint detection LAM RF Generator rack: ISO AE RFG 1250 RF generator
81
LAM RESEARCH 4520i #9188609

LAM RESEARCH

4520i

Oxide etcher, 8" 2004 vintage.
78