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PLASMATHERM Versaline #9254663
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Versaline

ICP Etcher, 3"-8" (4) Chambers (4) PM Modules Cassette to cassette BROOKS AUTOMATION MX 600 Handler
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PLASMATHERM Versaline #293602359
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ICP Etcher.
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PLASMATHERM Versaline #293621803
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PLASMATHERM

Versaline

ICP-RIE System Missing parts: Valves Elevators Power supplies Generators Pumps 2014 vintage.
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PLASMATHERM Versaline #293621804
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PLASMATHERM

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ICP-RIE System Missing parts: Valves Elevators Power supplies Generators Pumps 2015 vintage.
110
PLASMATHERM Versaline #9254667
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CVD System, 3"-8" (3) Chambers (2) PECVD Chambers HDP-CVD Chamber (3) Power modules BROOKS AUTOMATIO
85
PLASMATHERM Versaline #9402602
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PLASMATHERM

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ICP Etcher.
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PLASMATHERM Versaline #293623685
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Deep silicon etcher PM1 Chamber PDC (2) Pumps 2011 vintage.
12
PLASMATHERM Versaline #293592006
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PLASMATHERM

Versaline

ICP-RIE System, 6" PSS ICP: 4" x 4".
69
PLASMATHERM Versaline #293587270
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PLASMATHERM

Versaline

ICP-RIE System PSS ICP: 4" x 4".
87
PLASMATHERM Versaline #9364606
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Versaline

ICP Etcher, 2"-6".
55