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STS / CPX Multiplex ICP #9243850

STS / CPX

Multiplex ICP

Plasma etcher, 6" ICP Process chamber Chamber Coil RF generator and matching unit Electrode RF gener
299
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STS / CPX Multiplex ICP #293603805

STS / CPX

Multiplex ICP

Deep Reactive Ion Etcher (DRIE), 6" Type: Non-MESC Anisotropic etch Vacuum Plasma Materials: Silicon
280
STS / CPX Multiplex ICP #9363071

STS / CPX

Multiplex ICP

Advanced Silicon Etcher (ASE) 2002 vintage.
210
STS / CPX Multiplex ICP #9363068

STS / CPX

Multiplex ICP

PECVD System.
289
STS / CPX Multiplex ICP #9363067

STS / CPX

Multiplex ICP

Advanced Oxide Etcher (AOE) 2000 vintage.
216
STS / CPX Multiplex ICP #9313228

STS / CPX

Multiplex ICP

Si Etcher, 6" Pressure controller: VAT PM-7 65046-PA52-AJAI/0016 Gas module: Chamber: Ar 100SCCM O2
206
STS / CPX Multiplex ICP #9303047

STS / CPX

Multiplex ICP

Al Etcher, 6" Pressure controller: VAT PM-7 65046-PA52-AJAI/0016 Gas module: Chamber: CL2 50SCCM HB
284
STS / CPX Multiplex ICP #9196059

STS / CPX

Multiplex ICP

DRIE Etcher Type of load lock: Single wafer load lock Process modules: Module 1 Module type: ASE Pro
371
STS / CPX Multiplex ICP #9186435

STS / CPX

Multiplex ICP

Cluster system, 8" With chamber Cassette station.
289
STS / CPX Multiplex ICP #9185200

STS / CPX

Multiplex ICP

Dry etcher, 8" BOSCH Process Handler Chiller Turbo pump HF Generator Carousel vacuum load lock With
322
STS / CPX Multiplex ICP #9222691

STS / CPX

Multiplex ICP

Deep silicon etcher, 8" XeF2 (Xenon di-fluoride) poly silicon release etch chamber Cfg wafer, 6" Va
264
STS / CPX Multiplex ICP #293609292

STS / CPX

Multiplex ICP

Advanced Oxide Etcher (AOE).
231
STS / CPX Multiplex ICP #9210326

STS / CPX

Multiplex ICP

AOE Oxide etcher, 6".
215