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Oxide etcher, 8" Wafer type: SNNF (2) Chambers: MXP Load locks: wide body Software Version: E3.7 Sh
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PVD system, 8" Process capabilities: CVD/Anneal and PVD (3) Chambers Chamber 1: CVD with liquid de
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CVD System, 8" Open cassette (4) WxZ MCVD Chambers Transfer robot: HP Robot (9) Gas channels RF Gen
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Etcher, 8" Cassette nest plastic, 8" Wafer shape: SNNF (Semi notch no flat) System information: Pla
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SACVD System, 8" Process: eMax Mainframe AC Power rack Chiller: Buffer chamber Cool down chamber w
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