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Metal etcher, 8" Process: Al (2) MxP ASP Chamber Wafer transfer system ASTEX Microwave power Gas lin
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CVD system Etch Trench Missing parts Heat exchanger SBC bd End point detector Dry pump Storage tray
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WCVD system, 8" P5000 Mark II frame 28-Slots expanded gas panel 8-Slots storage elevator 21-Slots VM
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Etch systems, 6" (Qty 3) ILD depostion and (Qty 1) W deposition There are 4 chambers in each tool Va
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