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晶圆大小
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(1)
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In-Line Single Wafer Plasma Etcher, 4" - 6" Cassette to cassette Currently configured for 6" wafers
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Plasma etcher Includes: ENI ACG-10T 1000w 13.56 RF generator, 200-240 V, 1 phase, 60 Hz Omega RD-4
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Plasma Etcher, rebuilt Cassette to Cassette, Polysilicon / Silicon Nitride Currently configured fo
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Plasma etcher, 4"-6" capability Photoresisty asher Cassette to cassette 13.56 MHz ENI RF Generator,
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etcher, 3"-6" Includes: ENI ACG-10 RF Generator (1000 Watt) DEC monitor station Chart recorder Mass
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