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晶圆大小
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优质的
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(1)
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Etcher Polyimide plasma (6) Gas inputs ENI OEM6-XL power supply EDWARDS Drystar DP80 Dry pump With E
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Etcher, 6" ENI OEM-6 RF Generator AC-2 Throttle valve assy Stepper controller for load lock arms End
112
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Automatic plasma etcher, 4"-6" Process: polysilicon, refractory metal silicides and nitrides Wafer a
125
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Etcher Flat / Focused lower electrode ENI RF Generator, 600 W Stepper motor arm drives Rebuilt gap W
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